Title of article
Studying of various nanolithography methods by using Scanning Probe Microscope
Author/Authors
Sadegh Hassani، S. نويسنده Catalysis and nanotechnology research division, research institute of petroleum industry, P. O. Box: 1485733111, Tehran, Iran. , , Sobat، Z. نويسنده Nanotechnology research center, Research institute of petroleum industry (RIPI), Tehran, Iran ,
Issue Information
فصلنامه با شماره پیاپی سال 2011
Pages
17
From page
159
To page
175
Abstract
The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithographical methods mostly based on making nano-structures is presented.
Journal title
International Journal of Nano Dimension (IJND)
Serial Year
2011
Journal title
International Journal of Nano Dimension (IJND)
Record number
1601734
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