• Title of article

    Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators

  • Author/Authors

    Mei، نويسنده , , Hua and DesMarteau، نويسنده , , Darryl D.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2014
  • Pages
    4
  • From page
    12
  • To page
    15
  • Abstract
    Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.
  • Keywords
    Iodonium , Photo-acid generators , Acid diffusion , Zwitterions
  • Journal title
    Journal of Fluorine Chemistry
  • Serial Year
    2014
  • Journal title
    Journal of Fluorine Chemistry
  • Record number

    1612214