Title of article
Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators
Author/Authors
Mei، نويسنده , , Hua and DesMarteau، نويسنده , , Darryl D.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2014
Pages
4
From page
12
To page
15
Abstract
Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.
Keywords
Iodonium , Photo-acid generators , Acid diffusion , Zwitterions
Journal title
Journal of Fluorine Chemistry
Serial Year
2014
Journal title
Journal of Fluorine Chemistry
Record number
1612214
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