UV laser co-photolytic gas-phase formation and deposition of nano-sized germanium sulfides

ArF laser co-photolysis of gaseous tetramethylgermane–thiirane mixtures results in chemical vapour deposition of nano-sized germanium sulfides (GeS and GeS2) whose formation is explained by gas-phase reaction between transiently formed nanosized clusters of S and Ge atoms. Other photolytic channels allow formation of S- and Ge-containing polymers.