Hydrogen effect on the optical and electrical properties of metal oxide and nitride thin films

Effect of hydrogen introduction into some metal oxide and nitride thin films was examined. Modification of electrical and optical properties by hydrogen introduction was examined on SnO 2 , Sn–GeO 2 , Ge–CdO 2 , ZnO. Electrical resistance could be reduced in some films without loosing their transparence to the visible light. Hydrogen introduction to Cu 3 N changed the film an electrical conductor. Films of AlN and TiN were rather insensitive to the hydrogen introduction; the hydrogen effect was only observed when the nitrides contain some imperfection in the compounds.