Author/Authors :
Dong، نويسنده , , Ki-Young and Ham، نويسنده , , Dae-Jin and Kang، نويسنده , , Byung-Hyun and Lee، نويسنده , , Keunsoo and Choi، نويسنده , , Jinnil and Lee، نويسنده , , Jinwoo and Choi، نويسنده , , Hyang Hee and Ju، نويسنده , , Byeong-Kwon، نويسنده ,
Abstract :
The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure.
Keywords :
screen printing , Carbon nanotube , Plasma treatment , Gas sensors
