Author/Authors :
Homma، نويسنده , , Takayuki and Sato، نويسنده , , Hirotaka and Kobayashi، نويسنده , , Hideomi and Arakawa، نويسنده , , Takahiro and Kudo، نويسنده , , Hiroyuki and Osaka، نويسنده , , Testuya and Shoji، نويسنده , , Shuichi and Ishisaki، نويسنده , , Yoshitaka and Oshima، نويسنده , , Tai and Iyomoto، نويسنده , , Naoko and Fujimoto، نويسنده , , Ryuichi and Mitsuda، نويسنده , , Kazuhisa، نويسنده ,
Abstract :
Sn electrodeposition was employed for fabricating an array of microabsorbers with a ‘mushroom-shaped’ microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique.
Keywords :
pattern formation , Electrodeposition , surfactant , X-ray microcalorimeter , Three-Dimensional Microstructure , Microfabrication
