Time-resolved electron stimulated desorption microscope for two-dimensional hydrogen chemical states analysis

Adsorbed protium and hydrogen have different adsorption energies on different adsorbates due to different chemical bonding states. A time-of-flight type electron-stimulated desorption (TOF-ESD) measures different types of chemical bonding states of adsorbed hydrogen on the solid surfaces. Different kinetic energies of desorbed H+ are distinguished as different kinetic energies in the spectrum of TOF-ESD microscopy. Hydrogen chemical state analysis has been demonstrated for the first time using scanning ESD ion microscope on the modified line-and-space composite of Si and SiO2. In this report we describe a construction and analytical result of two kinds of hydrogen maps (also oxygen maps) corresponding to Si-line and SiO2-line with the spatial resolution of less than 1 μm.