Behavior of the sputtered copper atoms, ions and excited species in a radio-frequency and direct current glow discharge

The behavior of the sputtered copper atoms and ions, both in the ground state and in excited levels, is modeled with a collisional–radiative model and two Monte Carlo models. The models are applied to a glow discharge operated in either the direct current (dc) or the radio-frequency (rf) mode, at similar conditions of gas pressure and electrical power (i.e. 5 torr and approx. 38 W). Typical results of the model are the level populations of all copper atomic and ionic levels, the relative contributions of various populating and depopulating processes, as well as the optical emission intensities of copper atomic and ionic lines. These results will be presented and compared for both operation modes.