Comparison of simulated and experimental fundamental ICP parameters

False-color spatial maps of experimentally determined and simulated values of electron number density (ne), electron temperature (Te) and heavy-particle temperature (Tg) for an argon inductively coupled plasma (ICP) in the plasma decay region (tail flame) are compared in detail. Experimental and theoretical values are in general very consistent; the difference between experiment and computation is approximately 10% for ne and Te and 20% for Tg in the plasma region examined. The errors in ne and Te are larger at the edge of the plasma, most likely because air entrainment becomes significant. This comparison provides a link between measurements and the current mathematical model and serves to partially validate both methods. Sources of error in both experiment and theory are considered and discussed.