Molecular dynamics simulations of energetic aluminum cluster deposition

We investigated energetic aluminum cluster deposition using a classical molecular dynamics (MD) simulation and the Metropolis Monte Carlo (MC) simulation. When local area reached melting state on the surface around impact point of an energetic aluminum cluster during a few ps, intermixing was easily achieved and a good epitaxial film with optimum bulk density was formed. For excellent film growth using cluster impact, it is necessary to make local area temperature higher than melting temperature on the surface around the impact point of an energetic cluster.