Two-dimensional hydrogen chemical-state analysis by a scanning electron-stimulated desorption ion microscope

Mass and kinetic-energy differences of desorbed ions are separated simultaneously for the first time in a time-of-flight (TOF) spectrum for electron-stimulated desorption (ESD) spectroscopy. Taking into account the difference in the kinetic energy for the same ion species, the TOF-ESD measures different chemical-bonding states from adsorbed hydrogen. Thus the hydrogen chemical state has been analyzed using scanning ESD ion microscopy (SESDIM) on modified line-and-space composites of silicon and SiO2. In this report, two kinds of two-dimensional hydrogen map, corresponding to silicon lines and SiO2 lines, are obtained at a spatial resolution of less than 1 μm.