Quantitative analysis of ceramics by laser-induced breakdown spectroscopy

A quantitative elemental analysis of ceramics was carried out with laser-induced breakdown spectroscopy. A Q-switched Nd:YAG laser was focused on ceramic targets in an argon atmosphere at reduced pressure, and the emission spectra from laser-induced plasma were measured using time-resolved spectroscopy. The experimental results showed that in argon at approximately 200 Torr, the spectral line intensity and the line-to-background ratio were maximized by observing the laser plasma with a time delay of 0.4 μs. Also, time-resolved measurement of a spectrum in the initial stage of plasma generation (∼1 μs) was effective for improving the slope of the calibration curve. Based on the results, standard ceramic samples were analyzed for magnesium, aluminum, calcium, iron and titanium, and linear calibration curves with a slope of unity were obtained by measuring spectra with a gate width of 0.4 μs at a delay time of 0.4 μs after the laser pulse in argon at 200 Torr.