Confocal microscopic X-ray fluorescence at the HASYLAB microfocus beamline: characteristics and possibilities

The possibilities of performing non-destructive elemental analysis in three dimensions on a variety of heterogeneous materials by means of an innovative variation of the microscopic X-ray fluorescence analysis (μ-XRF) method are described. Next to employing focusing optics for concentration of the primary beam of X-rays, a second optical element between the sample and the energy-dispersive detector is used in confocal μ-XRF. Thus, only X-ray fluorescence signals from a cube-like volume (within certain limits imposed by the absorption of the radiation in the sample) can be arbitrarily positioned within the sample. The distribution of major, minor and trace elements (down to the sub-ppm concentration level in some matrices) along lines and planes within the sample can be visualized with a spatial resolution of the order of 15–40 μm. The lowest detectable amounts in confocal mode using pink-beam excitation are situated at the sub-femtogram level.