Tomographic quantitative phase measurement by hard X-ray micro-interferometer with 250 nm spatial resolution

Tomographic quantitative phase measurement has been carried out by using a hard X-ray micro-interferometer in Hyogo-ID at SPring-8. The micro-interferometer combines an imaging microscope and a wavefront-division-type interferometer by using a novel optical element called a “twin zone plate.” A three-dimensional quantitative phase distribution of a glass capillary with an outer diameter of 6 μm was successfully obtained with the tomographic technique. The measured refractive index corresponded to the ideal value. The spatial resolution of the tomographic image was estimated to be 250 nm and the density resolution was estimated to be 0.6 g/cm3.