Analytical atomic spectrometry and imaging: Looking backward from 2020 to 1975

Some general aspects of the evolution of atomic spectrometry for chemical analysis over the period 1975 to now are described. Performance parameters such as detection limits and spatial analytical potential (lateral and depth resolution) are compared with the evolution of integrated circuit technology as described in Mooreʹs Law. A few general trends of future development for the coming decade are postulated. Attention will be focused on analysis and imaging with beam techniques, especially secondary ion mass spectrometry and X-ray techniques on the basis of excitation with synchrotron radiation.