The Shirley-equivalent electron inelastic scattering cross-section function

The inelastic scattering phenomenon of electrons in solids as seen by procedures using the Shirley-type empirical background is discussed. In close analogy with the Tougaard-type background correction procedure, the inelastic scattering cross-section function resulting in Shirley-equivalent background is derived. The main value of such a function––in addition to providing evidence that the Shirley method is based on a reasonable cross-section function––is in explaining the different energy dependence of both popular methods, especially near to photopeaks. The functional form of the scattering cross-section function is given, with some intuitively determined parameters. Evaluation methods based on the derived cross-section function have been implemented and tested. The cross-section based background calculation method nicely reproduces the results of the classic method and it can be used in generating peak tails, too.