Title of article :
Formation of pyramidal etch hillocks in a Kossel crystal
Author/Authors :
Suلrez، نويسنده , , M.P. and Mirabella، نويسنده , , D.A. and Aldao، نويسنده , , C.M.، نويسنده ,
Issue Information :
هفته نامه با شماره پیاپی سال 2005
Abstract :
Surface roughening due to anisotropic etching was studied experimentally and modeled using the Monte Carlo method for a Kossel crystal. Simulations were used to explore a possible formation mechanism for the appearance of etch hillocks in two and three dimensions. Similarities with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(1 0 0) are discussed.
Keywords :
Monte Carlo simulations , Scanning electron microscopy , Etching , surface structure , roughness and topography , morphology , Silicon , KOH
Journal title :
Surface Science
Journal title :
Surface Science
