Structural characterization of Pb nanoislands in SiO2/Si interface synthesized by ion implantation through MEIS analysis

Medium energy ion scattering (MEIS) measurements and transmission electron microscopy (TEM) observations are applied to characterize a buried Pb nanoparticle (NP) system synthesized by ion implantation. The NPs are located at the SiO2/Si film interface, forming a dense two-dimensional array. Full 2D (energy and angle) experimental MEIS spectra are compared with Monte Carlo simulated ones. The results demonstrate that MEIS measurements provide microstructural information (mean NP volume of about 150 nm3 and areal density of about 4 × 1011 NP/cm2), but no accurate information on the NP geometrical shape.