Focusing systems for the generation of X-ray micro beam: An overview

This manuscript reviews the most used optical systems for X-ray microprobes and summarizes the experiences in research with synchrotron radiation as well as with X-ray tube generators. ed for smaller beam spot sizes for various applications and the unique properties of X-rays have induced a remarkable and fast development in X-ray optical systems. These systems are divided into three main categories: diffractive, reflective and refractive. Examples of the three will be covered in this paper, highlighting the properties that allow having spot sizes down to sub-micrometer regime. r, the extraordinary capabilities of such systems are always relative. Therefore, an overview of the techniques that use such optical systems will be given, emphasizing their applicability on several case studies.