Surface element-mapping of three dimensional structures by laser-induced breakdown spectroscopy

During lateral mapping with laser-induced breakdown spectroscopy (LIBS) the focal position of the plasma-generating laser needs to be kept stable on the sample surface area to be probed. Therefore, three-dimensional structures like edged surfaces require a permanent re-focusing. cribe a new auto-focusing technique to perform surface elemental mapping with LIBS by correcting the focusing lens-to-sample distance using a direct monitoring of the LIBS signal intensity. This method allows the scanning of surfaces with strong height fluctuations of several millimeters without the need of any additional devices. The auto-focusing method is valuable for LIBS applications made on complex-shaped samples or simply to improve the measurement reproducibility. Applications are LIBS analyses of samples exhibiting drill holes or steep edges. ocedure does not need a constant focal plane and follows the topographic profile of the sample surface. Impurities and material inclusions are well detected. From the topographic information additionally obtained, a three-dimensional image of the sample can be deduced. Depth resolution is limited by the Rayleigh range of the LIBS laser light. The method is best suited for low energy laser pulses with high repetition rate and infrared emission.