Soft X-ray photoemission spectroscopy study on the interaction between CuFPc molecules and Si(1 1 1)7×7 surface

High resolution soft X-ray photoemission measurements have been performed onto ultra thin films of hexadecafluoro copper phthalocyanine deposited, at room temperature and in ultra high vacuum conditions, onto clean Si(1 1 1)7×7 substrate. The Si 2p spectra show the missing of the adatoms signal and the appearance of a broad feature mainly due to F–Si bonds. The Si 2p spectrum allows us to exclude the loss of copper atom from the molecule during the deposition. C 1s spectrum evidences the presence of Si–C interaction. These results confirm previously published X-ray photoemission spectroscopy fluorine spectra, which clearly present the effects of the interaction of F atoms of the molecule with the silicon substrate and a strong modification of the C 1s spectrum.