Energy and size effects in sputtering of surface metal nanoclusters under low energy ion bombardment

Molecular dynamics simulations of sputtering of copper clusters, which consisted of 13, 27, 39, 75 and 195 Cu atoms on a (0 0 0 1) graphite surface by 100–400 eV Ar and Xe ions have been performed. Some of the results have been published previously [Nucl. Instru. Meth. B 227 (2005) 261 and Nucl. Instru. Meth. B 228 (2005) 41], but are again discussed here together with additional results. Energy and size effects of ion backscattering from and sputtering of isolated surface clusters are discussed.