Aerosol-assisted MOCVD growth of Gd2O3-doped CeO2 thin SOFC electrolyte film on anode substrate

Aerosol-assisted metal-organic chemical vapor deposition (AA-MOCVD) with β-diketonate precursors was employed in depositing thin films of solid oxide fuel cells (SOFCs) electrolyte material, gadolinia-doped ceria (GDC), on anode (NiO+YSZ) substrates. The films have been successfully synthesized in a wide temperature range (300–600 °C) and characterized by X-ray powder diffraction, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sheet resistance measurements were carried out between 350 and 850 °C to study the effects of adsorbed oxygen on film ionic conductivity.