Chemical solution deposition prepared dense proton conducting Y-doped BaZrO3 thin films for SOFC and sensor devices

A hybrid-type chemical solution deposition (CSD) process for the fabrication of dense proton conducting BaZr0.80Y0.20O(3−x) (BZY20) films has been developed. The propionate based precursor solution showed an excellent long-term stability of more than 6 months. From XRD and SEM studies, phase purity and the microstructure are determined. Proton conductivity of the 630-nm-thick BZY20 film deposited on a platinized silicon substrate was established by impedance spectroscopy. The obtained resistances are, however, much higher than for true bulk samples. Possible reasons for this discrepancy are discussed.