Title of article :
Pattern formation in polymer films under the mask
Author/Authors :
Peng، نويسنده , , Juan and Han، نويسنده , , Yanchun and Yang، نويسنده , , Yuming and Li، نويسنده , , Binyao، نويسنده ,
Issue Information :
دوهفته نامه با شماره پیاپی سال 2003
Abstract :
This paper presents a straightforward method for patterning thin films of polymers, i.e. a prepatterned mask is used to induce self-assembly of polymers and the resulting pattern is the same as the lateral structures in the mask on a submicrometre length scale. The patterns can be formed at above Tg+30 °C in a short time and the external electric field is not crucial. Electrostatic force is assumed to be the driving force for the pattern transfer. Viscous fingering and novel stress-relief lateral morphology induced under the featureless mask are also observed and the formation mechanisms are discussed.
Keywords :
Electrostatic instability , patterning , Polymer film