Abstract :
The local structure and local conduction paths of Ga–In–Zn–O (GIZO) and Hf–In–Zn–O (HIZO) amorphous thin films were investigated by the extended X-ray absorption fine structure (EXAFS). We found that the local hindrance paths of In–Ga and In–Hf exist in the conduction paths of amorphous GIZO and HIZO semiconductor thin films, respectively.
