Author/Authors :
Ma، نويسنده , , Jin and Hao، نويسنده , , Xiaotao and Ma، نويسنده , , Honglei and Xu، نويسنده , , Xiangang and Yang، نويسنده , , Yingge and Huang، نويسنده , , Shulai and Zhang، نويسنده , , Deheng and Cheng، نويسنده , , Chuanfu، نويسنده ,
Abstract :
Transparent conducting antimony-doped tin oxide (SnO2: Sb) films have been prepared on polyimide (PI) substrates by rf magnetron sputtering technique at low substrate temperature (30–220 °C). Polycrystalline Sb-doped SnO2 films having rutile structure with resistivity as low as 3.7×10−3 Ω cm were deposited on a PI substrate. The average transmittance for films deposited on PI with 285 nm thickness exceeded 70% in the visible range. The properties for the films deposited on organic substrates were studied in detail.
