Growth and characterization of Ba(Zr0.1Ti0.9)O3 thin films deposited by pulsed excimer laser ablation

Thin films of Ba(Zr0.1Ti0.9)O3 were deposited by pulsed excimer laser ablation technique on Pt substrates. The films were polycrystalline in nature. The room temperature dielectric constant was 450 at a frequency of 100 kHz. Studies indicated that deposition temperature and pressure both have an effect on the crystallinity of the films deposited. The films showed a slightly diffused phase transition in the range of 230–300 K. The ferroelectric nature of the film was confirmed by the polarization hysteresis curves. The saturation and remanent polarization were 13.4 and 5.9 μC/cm2, respectively, with a coercive field of 45 kV/cm. The dispersion in both the real and the imaginary parts of the dielectric constant at low frequencies with increase in temperature was attributed to the space charge contribution to the complex dielectric constant.