Nanoscale pattern formations on surface induced by ion sputtering

We investigate diverse pattern formations on sputter-eroded surfaces such as ripples, dots, holes, wires structures. The morphological evolution of ion bombarded surface can be described by the nonlinear Kuramoto–Sivashinsky (KS) equation. Here by performing numerical integration of the KS equation, we show that the diverse pattern formations can be controlled by adjusting experimental conditions such as incidence angle and energy of ion beam.