Design and fabrication of a carbon-nanotube-based capacitor patterned on an Archimedean spiral

To achieve the maximum area utilization ratio for a parallel electrode capacitor, an Archimedean spiral was used to design the capacitor pattern. Multi-walled vertically aligned carbon nanotubes (VACNTs) were used for the capacitor electrodes because of their metallic properties and their endurance toward various chemical reagents. In contrast to the parallel plate capacitor, the total capacitance was formed by parallel connections of all unit cells of the individual VACNT capacitors, so that a relatively higher capacitance was obtained. This design can provide a new approach to fill diverse dielectrics into a spiral capacitor to obtain different capacitances for various applications.