Title of article :
Diamond film coated on WC/Co tools by double bias-assisted hot filament CVD
Author/Authors :
Malcher، نويسنده , , V and Mr?ka، نويسنده , , A and Kromka، نويسنده , , O. and Satka، نويسنده , , A and Jan??k، نويسنده , , J، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 2002
Pages :
4
From page :
201
To page :
204
Abstract :
WC–6%Co cutting tool inserts were coated with diamond films using a double bias-assisted hot-filament chemical vapor deposition method. Coating of the cutting tools with chemical vapor deposition diamond is taken as a three-step process in which the growth of diamond follows the pretreatment and nucleation of the substrate. The presented operating parameters allow to substantially suppress the presence of amorphous carbon and/or graphite phases in the diamond films deposited on WC/Co tools. The substrate temperature of ∼700 °C, and a low methane concentration result in a sharp diamond Raman peak centered at 1333–34 cm−1 with FWHM of 6–7 cm−1 as detected by micro-Raman spectroscopy. The diamond morphology is characterized by scanning electron microscopy, optical microscopy, and micro-Raman spectroscopy.
Keywords :
Micro-Raman spectra , Nucleation , WC/Co inserts , Hot-filament system
Journal title :
Current Applied Physics
Serial Year :
2002
Journal title :
Current Applied Physics
Record number :
1769048
Link To Document :
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