Author/Authors :
Kang، نويسنده , , Eung Kil and Jang، نويسنده , , Hyuk Kyoo and Lee، نويسنده , , Sung Kyun and Park، نويسنده , , Eung Ryul and Lee، نويسنده , , Cheol Eui and Kim، نويسنده , , Kyung Min and Noh، نويسنده , , Seung Jeong and Yeom، نويسنده , , Seung-Jin، نويسنده ,
Abstract :
Ferroelectric thin films of sol–gel-derived Pb(Zrx, Ti1−x)O3 (lead–zirconate–titanate, PZT) were obtained by the low-temperature processing employing oxygen-plasma treatment. The as-coated PZT films were annealed in oxygen ambience at 450 °C, followed by oxygen-plasma treatment at 200 °C, which gave rise to the ferroelectric hysteresis. Annealing of the as-coated PZT films followed by oxygen-plasma teratment at 200 °C gave rise to the ferroelectric hysteresis.
Keywords :
low-temperature processing , Thin films , Oxygen-plasma treatment , PZT
