Desorption of InOH from indium oxides under exposure to atomic hydrogen

Species desorbing from indium oxides under exposure to atomic hydrogen (H) were observed with a quadrupole mass spectrometer. The desorption of InOH was detected at a temperature as low as 410°C, which is in contrast with the fact that, with molecular hydrogen, a much higher temperature (850°C) was required to generate InOH. Upon the interruption of H generation, the InOH signal disappeared immediately, suggesting that H is involved in the reactions leading to InOH desorption. Relevance to the low-temperature cleaning of an InP surface with H is discussed.