Title of article :
Efficient chemical vapour deposition of hydrocarbon polymeric films by UV laser induced photolysis of 3-butyn-2-one
Author/Authors :
Pola، نويسنده , , Josef and Ouchi، نويسنده , , Akihiko and Saito، نويسنده , , Kimitsugu and Ishikawa، نويسنده , , Keiichiro and Koga، نويسنده , , Yoshinori، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1996
Pages :
5
From page :
279
To page :
283
Abstract :
ArF and XeCl laser induced photolysis of 3-butyn-2-one in the gas phase affords ethane, buta-1,3-diyne, ethyne and methane as minor gaseous products and a thin film of a carbon-rich organic polymer as a major product. The reaction is suitable for low-temperature chemical vapour deposition of adhesive hydrocarbon films.
Journal title :
Chemical Physics Letters
Serial Year :
1996
Journal title :
Chemical Physics Letters
Record number :
1778835
Link To Document :
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