Author/Authors :
Lai، نويسنده , , S.H and Huang، نويسنده , , K.P. and Pan، نويسنده , , Y.M. and Chen، نويسنده , , Y.L. and CHAN، نويسنده , , L.H. and Lin، نويسنده , , Gregory P. and Shih، نويسنده , , H.C.، نويسنده ,
Abstract :
The fluorinated amorphous carbon nanoparticles (a-C:F NPs) films have been prepared on a porous alumina at a lower temperature of ∼100 °C by an ECR-CVD system with a mixture of CF4, C2H2 and Ar as precursors. The morphology of a-C:F NPs films was verified by FESEM. The microstructure and chemical bonding nature of the a-C:F NPs films were investigated by Raman spectroscopy and XPS, respectively. The fluorinated samples need a lower field (∼2.25 V/μm for 10.6% F a-C:F NPs films) to emit the electron than unfluorinated ones. The excellent field-emission properties of a-C:F NPs films are due to the effect of the shape, fluorine doping and dangling bonds.