Dependence of substrate temperature of Zn0.8Co0.2O films deposited by pulsed DC magnetron sputtering

We have investigated the microstructure, electrical and magnetic properties of the ZnCoO thin films, which were prepared by the asymmetrical bipolar-pulsed DC magnetron sputtering as a function of substrate temperature. The structural properties of ZnCoO films were characterized with a high resolution XRD. The XRD patterns of the ZnCoO films showed a strong (0 0 2) preferential orientation. The average crystallite size was 23–35 nm, which was estimated from full width at half maximum of XRD results. The electrical resistivity of the films were measured by the van der Pauw method through Hall measurement and showed below 10−1 Ω cm above 300 °C. The magnetic properties of the ZnCoO films were analyzed by the alternating gradient magnetometer at room temperature. All of the films were exhibited the ferromagnetic nature. The high conductivity and room temperature ferromagnetism of the ZnCoO films above 300 °C suggested that the possibility for the application to diluted magnetic semiconductors.