Development and characteristics of solenoid-type SMD RF chip inductors

Simple, solenoid-type surface-mounted device (SMD) chip inductors utilizing low-loss Al2O3 core materials for a radio-frequency (RF) drive microwave circuit application were developed. The SMD chip inductors were fabricated with five different specifications, namely, 0.86 × 0.46 × 0.45, 1.0 × 0.5 × 0.5, 1.5 × 1.0 × 0.7, 2.1 × 1.5 × 1.0, and 2.4 × 2.0 × 1.4 mm3. Copper coils with diameters in the range of 27–40 μm were used. The frequency characteristics of the inductance (L), quality factor (Q), and impedance of the developed inductors were measured using a RF impedance/material analyzer (HP4291B with HP16193A test fixture). It was observed that the developed inductors with the number of turns of 12 have L of 34–270 nH, exhibit a self-resonant frequency (SRF) of 3.7–0.75 GHz, and have Q of 40–70 over the frequency ranges of 200 MHz–1.2 GHz. The L of inductors increases and the SRF decreases with increasing the size of inductors. From the experimental results, it was concluded that the high-frequency data calculated from the equivalent circuit and the derived equation of Q described quite well the experimental data of the developed inductors.