Author/Authors :
Ahn، نويسنده , , Chang Won and Won، نويسنده , , Sung Sik and Ullah، نويسنده , , Aman and Lee، نويسنده , , Sun Young and Lee، نويسنده , , Su Dae and Lee، نويسنده , , Ji Hye and Jo، نويسنده , , William and Kim، نويسنده , , Ill Won، نويسنده ,
Abstract :
0.85Bi0.5Na0.5TiO3–0.15Bi0.5K0.5TiO3 (BNKT15) lead-free thin films were prepared on Pt(111)/TiO2/SiO2/Si(100) substrates by the chemical solution deposition method. BNKT15 are MPB composition in the Bi0.5Na0.5TiO3–Bi0.5K0.5TiO3 (BNT–BKT) system. The maximum piezoelectric coefficient (d33,f) value of BNKT15 thin film is approximately 75 pm/V, which is comparable to that of polycrystalline PZT thin films. These results suggest that BNKT15 thin film can be used as an alternative for PZT films in piezoelectric micro-electromechanical systems.
Keywords :
Bismuth sodium titanate , Piezoelectric , lead-free , Ferroelectric , Thin film
