Author/Authors :
Yang، نويسنده , , Dong-Seok and Cheol Lee، نويسنده , , Jae and Chung، نويسنده , , JaeGwan and Lee، نويسنده , , Eunha and Anass، نويسنده , , Benayad and Sung، نويسنده , , Nark-Eon and Min Lee، نويسنده , , Jay and Jae Kang، نويسنده , , Hee، نويسنده ,
Abstract :
The local structure and local conduction paths of Ga–In–Zn–O (GIZO) and Hf–In–Zn–O (HIZO) amorphous thin films were investigated by the extended X-ray absorption fine structure (EXAFS). We found that the local hindrance paths of In–Ga and In–Hf exist in the conduction paths of amorphous GIZO and HIZO semiconductor thin films, respectively.
Keywords :
A. Semiconductors , E. EXAFS , B. Sputtering , C. Local structure
