TiCN coatings on aluminum alloy formed by MO-PACVD

TiCN layers were deposited on an aluminum alloy (Si 0.5%, Fe 0.5%, Cu 4.3%, Mn 0.6%, Mg 1.5%, Cr 0.1%, Zn 0.25%, bal. Al) by using diethylaminotitanium, hydrogen and nitrogen with the pulsed d.c. PACVD process. The effect of process parameters such as precursor evaporation temperature, duty ratio, frequency, voltage, H2/N2 gas ratio on the properties of the TiCN layer was investigated. The layer thus obtained had high hardness and a low friction coefficient. Detailed results on the hardness, surface morphology, WDS analysis, wear test and scratch test of these layers are presented.