Ti1−xAlxN, Ti1−xZrxN and Ti1−xCrxN films synthesized by the AIP method

Ti1−xAlxN, Ti1−xZrxN and Ti1−xCrxN films were synthesized by changing the contents, x, by using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti1−xAlxN films changed from the NaCl into wurtzite type at x=0.6–0.7, while Ti1−xCrxN and Ti1−xZrxN kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti1−xAlxN and Ti1−xCrxN monotonously decreased from 4.23 Å (x=0) down to 4.17 Å (x=0.6) and to 4.16 Å (x=1.0), respectively. On the other hand, the lattice parameters of Ti1−xZrxN films monotonously increased from 4.23 Å (x=0) up to 4.58 Å (x=1.0). The maximum micro-hardness of Ti1−xAlxN, Ti1−xZrxN and Ti1−xCrxN films were Hv 3200 (x=0.6), 3000 (x=0.5) and 3000 (x=0.2), respectively.