Title of article :
Effect of sputtering parameters on Ta coatings for gun bore applications
Author/Authors :
Matson، نويسنده , , D.W and McClanahan، نويسنده , , E.D and Rice، نويسنده , , J.P. and Lee، نويسنده , , S.L and Windover، نويسنده , , D، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Abstract :
Tantalum offers a number of attractive properties for gun bore coating applications, including a high melting temperature, high ductility, and an environmentally friendly deposition method. However, vapor-deposited tantalum can appear in both the characteristic bcc phase found in the bulk material, and in a very brittle and less desirable ‘beta’ phase. Presence of the beta phase in bore coatings is considered undesirable because of its brittleness and resulting failure as the coating is stressed. A high-rate triode sputtering system with a cylindrical coating geometry was used to produce thick tantalum coatings on 4340 steel smooth bore cylindrical substrates. A systematic series of tests were performed to evaluate the effects of sputtering gas species (Ar, Kr, Xe) and substrate temperature (100–300°C) during deposition on the phase and microstructure of the coatings. Heavier sputtering gases and higher substrate temperatures were found to promote the formation of bcc-phase tantalum coatings. Use of a movable target assembly was shown to promote the production of dense, single-phase tantalum coatings.
Keywords :
Triode sputtering , tantalum , Sputtering gas , Phase , Temperature , High rate sputtering
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology