The use of magnetron arrays for depositing large-area oxide coatings

The application of coatings over large areas can be approached through the use of large deposition sources. A versatile alternative, e.g. to long rectangular magnetrons, are linear arrays of circular planar magnetrons to process coatings over wide path lengths. We investigate the feasibility of using a linear array of 76-mm-diameter magnetron sources operated in the rf mode to deposit oxide target materials across a path in excess of 0.7 m wide. Specific results are given for the case of a 2-μm-thick alumina coating.