Title of article :
Diamond-like carbon films prepared by filtered arc deposition for electron field emission application
Author/Authors :
Mao، نويسنده , , D.S. and Li، نويسنده , , W. and Wang، نويسنده , , X. and Liu، نويسنده , , X.H.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
In this paper, hydrogen-free diamond-like carbon (DLC) films were prepared by filtered arc deposition. The effect of sp3 content and annealing on electron field emission properties of the DLC films was studied. A patterned DLC flat thin film column emitter array was fabricated by oxygen reactive ion beam etching (RIBE) technique. It was shown that the threshold field of the DLC films was approximately 3–15 V/μm. Field emission site density ranged from 5×102 to 2×103 /cm2. The field emission mechanism of the DLC films is also discussed.
Keywords :
Diamond-like carbon , Filtered arc deposition , electron field emission , Reactive ion beam etching
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
