Hollow cathode plasma sources for large area surface treatment

Plasma generation over large areas using a hollow cathode discharge is described in this study. Radio frequency linear hollow cathodes in several arrangements, for operation at reduced gas pressure and suitable for scale-up, are presented. Examples of surface processing and coating by PVD, both by hollow cathode discharge (HCD) and hollow cathode arc (HCA), are given. A non-equilibrium atmospheric plasma source utilizing a fused hollow cathode (FHC) with its modular concept can be used for surface treatment, activation or cleaning of temperature sensitive materials at ambient atmosphere. Results on polyethylene and polyethyleneterephtalate activation are presented.