Grazing-incidence X-ray scattering and diffraction study of the nitrogen ion implantation layer produced by plasma-based ion implantation

The layer phases and geometric character of the surface formed by plasma-based ion implantation have been studied using grazing incidence X-ray scattering and diffraction methods. The results indicate that the phase types and contents in the layer are related closely to the implantation voltage and temperature; in some cases, the layer is almost entirely composed of iron nitrides, and in other cases, no iron nitrides can be detected in the layer. The surface exhibits an obviously self-affine character, and the static scaling exponent is greatly affected by the formation of iron nitrides in the layer.