Title of article :
Multilayer TiAlN coatings with composition gradient
Author/Authors :
Manaila، نويسنده , , R. and Devenyi، نويسنده , , A. and Biro، نويسنده , , D. and David، نويسنده , , L. and Barna، نويسنده , , P.B. and Kovacs، نويسنده , , A.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Abstract :
The fuzzy-logic process control system has been adapted to the unbalanced magnetron reactive sputter deposition of Ti1−xAlxN coatings. This made possible the dynamic control of the deposition rate, chemical composition and structure of the coatings and provided stable working conditions inside the hysteresis loop of the reactive sputtering also. By applying this control system, multilayers of micro- and nanocrystalline composite structures were prepared with compositions of Ti39Al61N and Ti56Al44N of TiN–AlN cubic solid solution phases.
Keywords :
Ti–Al–N coating , reactive sputtering , Fuzzy-control , Graded-composition , nanocrystals , Multilayer
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
