Structural modification induced by Mo implantation in stainless steel

316LVM, an austenitic stainless steel, was implanted at 49 keV with molybdenum ions. Implantation doses varied between 1×1015 and 3.5×1016 ions cm−2. The structure of the implanted layer was examined by grazing incidence X-ray diffraction. As a function of ion dose, expanded fcc austenite was first observed, then a tetragonal distortion of the fcc lattice occurred. Above 8×1015 ions cm−2 a new bcc structure appeared and finally the implanted layer was amorphized.