• Title of article

    Erratum to ‘Synthesis of carbon nitride films by high-density helicon wave-excited plasma sputtering’: [Surf. Coat. Technol. 142–144 (2001) 874–880.]

  • Author/Authors

    Setsuhara، نويسنده , , Y. and Sakawa، نويسنده , , Y. and Shoji، نويسنده , , T. and Kumagai، نويسنده , , M. and Miyake، نويسنده , , S.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2002
  • Pages
    1
  • From page
    319
  • To page
    319
  • Journal title
    Surface and Coatings Technology
  • Serial Year
    2002
  • Journal title
    Surface and Coatings Technology
  • Record number

    1803696