Title of article :
Aspects of plasma-enhanced magnetron-sputtered deposition of hard coatings on cutting tools
Author/Authors :
Wei، نويسنده , , Ronghua and Vajo، نويسنده , , John J and Matossian، نويسنده , , Jesse N and Gardos، نويسنده , , Michael N، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Pages :
8
From page :
465
To page :
472
Abstract :
Plasma-enhanced magnetron-sputtered deposition (PMD) is a physical vapor deposition process that combines plasma–ion bombardment with conventional magnetron sputtering to produce wear-resistant coatings with unique microstructural and tool-wear properties. With respect to microstructural properties, TiN deposited using the PMD process shows a very fine grain size and high internal stress with excellent adhesion and cohesion properties. With respect to tool-wear properties, end mills, shaper cutters, and hobs coated with TiN using the PMD process, show improved life when compared to those using arc-evaporation and unbalanced magnetron sputtering processes. The microstructural and tool-wear characteristics are believed to result from the plasma and ion-bombardment properties of the PMD coating process. In this paper, we present a summary description of the PMD plasma–ion bombardment process as well as gear-cutting wear measurements for PMD-coated cutting tools.
Keywords :
Cutting tools , physical vapor deposition , Magnetron sputtering , Coating process
Journal title :
Surface and Coatings Technology
Serial Year :
2002
Journal title :
Surface and Coatings Technology
Record number :
1804334
Link To Document :
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